• Vacuum Pumps Repair Services and Accessories

    • Cryogenics Pump: CTI ; Anelva
    • Turbomoleculars pump: Leybold; Pfeiffer; Varian
    • Rotary Oil Pump: Alcatel; Leybold; Edwards; Ulvac; Pfeiffer

  • DC Power Supply Repair Services

    • Advanced Energy – Pinnacle, MDL-15, MDX series (MDX-L12, MDX-L12M, MDX-L12-650, MDX-L12M-650)
    • AMAT – DC Power Distributor
    • EMI – EMS Power Supplies (For Eaton & Varian Implanter)
    • Varian – CPW Series, Filament power supply
    • Nemic Lamda – 5v, 12v, 24v, 48v…etc
  • RF Power Supply Repair Services

    • Advanced Energy – RFG1250, RFG3000, RFG5500, RFX1250, PDX series, PDW series
    • Comdel – CX-600, CPS-1001S (13.56MHZ/60MHZ), CLF5000
    • ENI – OEM-6, OEM-12(A,B), OEM-25, OEM28, OEM50, PL2-HF
    • Daihen – MFG-20SA3
    • RFPP – RFPP: RF5S, RF10S, RF20S, RF100S, RF25M, LF10A
    • Pearl Kogyo RF Generators
    • Other makes
  • RF Matching Network Repair Services

    • Advanced Energy – RF Matching Network
    • AMAT – P5000 ETCH Match Network, P5000 CVD Match Network
    • ENI – MWD-25LD
    • Trazar – AMU Series (AMU1, AMU2…etc)
    • Pearl Kogyo
    • Other makes
  • Special Vacuum Bellow Repair Services

    • All special bellows from Axcelis, Varian, Endura, Lam
    • Supply of all new bellows, feedthroughs and vacuum fittings
  • Heat exchangers and Water Chillers Repair Services

    • Heat exchanger of various capacity
    • Recirculating Chillers of various capacity
  • Other Services

    • Sourcing of Third Party Parts
    • Horiba Stec Mass Flow Controllers
    • Vacuum instrumentations eg. Vacuum gauges, vacuum controller
    • Heater and heater jackets
    • Rectrofitting and upgrading project for Equipment
    • Sales of New and Refurbished Equipment